Remote identification of protrusions and dents on surfaces by terahertz reflectometry with spatial beam filtering and out-of-focus detection
Remote identification of protrusions and dents on surfaces by terahertz reflectometry with spatial beam filtering and out-of-focus detection
复制标题
通过具有空间光束过滤和失焦检测功能的太赫兹反射计远程识别表面上的突起和凹痕
DOI：
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发表时间：
2003
期刊：
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通讯作者：
H. Roskos
中科院分区：
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作者：
N. Hasegawa;T. Löffler;M. Thomson;H. Roskos
我们提出了两个太赫兹反射模式，优化是敏感的表面特征的曲率。第一种是暗场技术，可以高灵敏度检测表面上的突起和凹痕。然而，它不能区分凸形和凹形。这在第二种技术中成为可能，该技术将离焦成像与合适的光束过滤相结合。这两种方法都可能对制造环境中的表面检测感兴趣;例如，用于金属加工期间的在线监测。
We propose two terahertz reflectometry modalities that are optimized to be sensitive to the curvature of surface features. The first is a dark-field technique that allows the detection of protrusions and dents on surfaces with high sensitivity. It cannot distinguish, however, between convex and concave shapes. This becomes possible with the second technique, which combines out-of-focus imaging with suitable beam filtering. Both methods may be of interest for surface inspection in fabrication environments; for example, for online monitoring during metal processing.