Polarity control of polycrystalline ZnO thin films deposited by magnetron sputtering on glass using an ultrathin aluminum layer
Polarity control of polycrystalline ZnO thin films deposited by magnetron sputtering on glass using an ultrathin aluminum layer
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使用超薄铝层在玻璃上磁控溅射沉积多晶 ZnO 薄膜的极性控制
DOI:
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发表时间:
2022
期刊:
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通讯作者:
Nanase Kawahata
中科院分区:
文献类型:
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作者:
HisaoMakino;Ayuto Kawamura;Chikato Hata;Nanase Kawahata