A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
复制标题
利用变压器改善电容耦合等离子体放电特性的研究
DOI：
10.1063/1.4936951
复制
发表时间：
2015
期刊：
影响因子：
--
通讯作者：
C. Chung
中科院分区：
文献类型：
--
作者：
Young;Hyun;Hyo;C. Chung
在等离子体放电系统中，供电线路、匹配网络和其他传输线路处的功率损耗会影响放电特性，例如功率传输效率、供电电极处的电压和电流以及等离子体密度。在本文中，我们提出了一种通过使用安装在电容耦合氩等离子体中的匹配网络和通电电极之间的降压变压器来减少功率损耗的方法。该降压变压器通过减少流过匹配网络和传输线的电流来降低功率损耗。结果，通过使用降压变压器，电力传输效率提高了约 5%–10%。然而，与没有变压器相比，等离子体密度显着增加。这可以通过欧姆加热的增加和直流自偏压的减少来理解。通过简单地安装变压器，可以提高电容耦合等离子体的放电效率。
In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%–10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas.