A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method
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FIB 微量采样技术和特定位点 TEM 样品制备方法
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
K. Umemura
中科院分区：
文献类型：
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作者：
T. Kamino;T. Yaguchi;T. Hashimoto;T. Ohnishi;K. Umemura
开发了一种FIB微量取样技术，以便于制备透射电子显微镜样品，同时允许样品保持完好。对深沟槽进行FIB碾磨，以去除包含感兴趣区域的样品的一部分。使用微操作器来抬出样品的一小部分，即微型样品。纤维辅助金属沉积用于将微样品粘接到微操作器上。随后使用FIB辅助金属沉积将微量样品抬出并安装到微量样品载体的边缘上。然后将微量样品稀释至约0.1微米的厚度，以便进行透射电子显微镜观察。所有上述步骤都是在同一FIB系统中在真空下完成的。当需要对特定位置进行评估或失效分析时，该程序是一种可靠的透射电子显微镜样品制备技术。用这种技术制作横断面和平面图的透射电子显微镜标本都是可行的。此外，还开发了一种从特定位置制备透射电子显微镜样品的技术。在该技术中，配备有FIB/TEM(STEM)兼容的样品夹持器的FIB系统被用于样品的减薄，例如微量样品。兼容的样品夹持器允许重复交替进行FIB研磨和透射电子显微镜(STEM)观察，从而能够从特定位置制备透射电子显微镜样品。
A FIB micro-sampling technique has been developed to facilitate TEM specimen preparation while allowing samples to remain intact. A deep trench is FIB-milled to remove a portion of the sample containing the region of interest. A micromanipulator is employed for the purpose of lifting out a small portion of the sample, i.e., the micro-sample. FIB assisted metal deposition is used to bond the micro-sample to the micromanipulator. The micro-sample is subsequently lifted out and mounted onto an edge of the micro-sample carrier using FIB assisted metal deposition. The micro-sample is then thinned to the thickness of about 0.1µm for TEM observation. All of the above steps are accomplished under vacuum in the same FIB system. This procedure is a reliable TEM specimen preparation technique when the evaluation or failure analysis of a specific site is required. Both cross sectional and plan view TEM specimen preparations are feasible with this technique. In addition, a technique to prepare TEM specimens from a specific site has also been developed. In this technique, an FIB system equipped with a FIB/TEM(STEM) compatible specimen holder is used for thinning of the samples, e.g., a micro-sample. The compatible specimen holder permits repeated alternating FIB milling and TEM(STEM) observation, enabling TEM specimen preparation from a specific site.