Numerical analysis of the effect of geometry on the performance of the Greek cross structure

Numerical analysis of the effect of geometry on the performance of the Greek cross structure
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几何形状对希腊十字结构性能影响的数值分析

DOI:
10.1109/icmts.1996.535655
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发表时间:
1996
期刊:
Proceedings of International Conference on Microelectronic Test Structures
影响因子:
--
通讯作者:
M. Fallon
M. Fallon
中科院分区:
--
文献类型:
--
作者:
M. Newsam;A. Walton;M. Fallon

文献摘要

被引文献

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本文研究了几何形状对从希腊十字型结构中提取的电阻率值的影响。这项工作表明,可以通过选择适当的布局来降低希腊十字的结构对结构的变异性。
This paper examines the effect that geometry has upon the value of resistivity that is extracted from Greek cross type structures. This work suggests that structure to structure variability of the Greek cross can be reduced through the choice of the appropriate layout.