An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM
An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM
复制标题
使用 SEM 检测纳米尺度表面拉纹的改进方法
DOI：
10.1007/978-3-540-74238-8_5
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发表时间：
2008
影响因子：
2
通讯作者：
T. Vynnyk
中科院分区：
文献类型：
--
作者：
E. Reithmeier;T. Vynnyk
将介绍一种用于记录技术表面 3D 显微地形的改进光度测量方法。建议的程序采用扫描电子显微镜 (SEM) 作为多探测器系统。测量的改进基于电子检测的扩展模型，以便以与已知方法不同的方式评估检测器信号。该方法将应用于校准球，以证明当前方法的准确性。
An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.