Adjacency-Clustering and Its Application for Yield Prediction in Integrated Circuit Manufacturing
Adjacency-Clustering and Its Application for Yield Prediction in Integrated Circuit Manufacturing
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DOI：
10.1287/opre.2018.1741
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发表时间：
2018-09
期刊：
影响因子：
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通讯作者：
D. Hochbaum;Sheng Liu
中科院分区：
文献类型：
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作者：
D. Hochbaum;Sheng Liu
在集成电路制造中，准确的成品率预测能够准确地估计生产成本并早期检测处理问题。据了解，缺陷往往是集群…
Accurate yield prediction in integrated circuit manufacturing enables accurate estimation of production cost and early detection of processing problems. It is known that defects tend to be clustere...