Poling thin-film x-cut lithium niobate for quasi-phase matching with sub-micrometer periodicity
Poling thin-film x-cut lithium niobate for quasi-phase matching with sub-micrometer periodicity
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DOI：
10.1063/1.5143266
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发表时间：
2020-05
影响因子：
3.2
通讯作者：
Jie Zhao;M. Rüsing;M. Roeper;L. Eng;S. Mookherjea
中科院分区：
文献类型：
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作者：
Jie Zhao;M. Rüsing;M. Roeper;L. Eng;S. Mookherjea
亚微米周期性准相位匹配光栅结构将有利于短波长非线性光学器件的发展。在这里，我们报告的可重复形成的周期性极化域的X-切割单晶薄膜锂的周期性短至600 nm。成形的单电压极化脉冲被施加到通过电子束和直写激光光刻的组合制造的电极结构。通过二次谐波显微镜和压电响应力显微镜成像获得了高质量成功极化的证据。对于亚微米周期结构，我们观察到由畴相互作用形成的具有双周期性的图案和尺寸<200 nm的特征。
Quasi-phase-matched grating structures in lithium niobate waveguides with sub-micrometer periodicities will benefit the development of short-wavelength nonlinear optical devices. Here, we report on the reproducible formation of periodically poled domains in x-cut single-crystalline thin-film lithium niobate with periodicities as short as 600 nm. Shaped single-voltage poling pulses were applied to electrode structures that were fabricated by a combination of electron-beam and direct-writing laser lithography. Evidence of successful poling with good quality was obtained through second-harmonic microscopy and piezoresponse force microscopy imaging. For the sub-micrometer period structures, we observed patterns with a double periodicity formed by domain interactions and features with sizes <200 nm.