Mercury Ion Beam Sputtering of Metals at Energies 4–15 kev
Mercury Ion Beam Sputtering of Metals at Energies 4–15 kev
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能量为 4–15 kev 的金属汞离子束溅射
DOI：
10.1063/1.1736125
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发表时间：
1961
期刊：
影响因子：
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通讯作者：
D. Rosenberg
中科院分区：
文献类型：
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作者：
G. Wehner;D. Rosenberg
对能量在 4-15 kev 之间的正常入射 Hg+ 离子测量了第 4、第 5 和第 6 周期的 14 种金属的溅射产额。通过测量离子束刺穿靶箔所需的时间来确定溅射速率。各种金属的结果表明，高能量下的产率与之前在较低离子能量下发现的产率相似。即与金属在周期表中的位置密切相关。在第 4 个周期中，产率从 Ti 增加到 V、Fe、Co、Ni 到 Cu，并以类似的方式在第 5 个周期中增加到 Ag，在第 6 个周期中增加到 Au。据信，具有更紧密填充的 d 壳的 Cu、Ag 和 Au 原子的行为更接近于硬球，并且总是产生最高的溅射产率。
Sputtering yields for 14 metals from the 4th, 5th, and 6th periods were measured for normally incident Hg+ ions at energies between 4–15 kev. The sputtering rate was determined by measuring the time required for the ion beam to pierce a target foil. Results for the various metals show that yields at high energy behave similarly to yields previously found at lower ion energy; i.e., are closely linked to the position of the metal in the periodic chart. Yields increase in the 4th period from Ti through V, Fe, Co, Ni to Cu and in a similar fashion in the 5th period to Ag and in the 6th period to Au. It is believed that Cu, Ag, and Au atoms with their more closely filled d shells behave more nearly like hard spheres and always produce the highest sputtering yields.