Multi-frequency MEMS acoustic emission sensor
Multi-frequency MEMS acoustic emission sensor
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DOI：
10.1016/j.sna.2023.114648
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发表时间：
2023-11
期刊：
影响因子：
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通讯作者：
T. Khan;Raguez Taha;Tonghao Zhang;Didem Ozevin
中科院分区：
文献类型：
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作者：
T. Khan;Raguez Taha;Tonghao Zhang;Didem Ozevin
本文设计了一种多频MEMS声发射传感器，并对其进行了表征和测试。该传感器包括16个单独的谐振器，调谐范围为100-700千赫。选择谐振器的频率，在它们并联连接时形成相消干涉，以提高信噪比。每个谐振器由形成质量的膜和提供刚度的四根梁组成。每个谐振器的膜尺寸保持相同，以使每个频率的灵敏度大致相同。数值分析了弹簧元件对谐振频率和灵敏度的影响。该传感器采用MEMSCAP PiezoMUMPs制造。表征实验表明，与设计值相比，单个谐振器的谐振频率略有变化。MEMS传感器采用定制设计的印刷电路板封装，以提高信噪比。并与传统声发射传感器进行了性能比较。MEMS声发射器件的灵敏度和频率带宽达到了与大型声发射传感器相当的水平。
In this paper, a multi-frequency MEMS acoustic emission (AE) sensor is designed, characterized, and tested. The sensor includes sixteen individual resonators tuned in the range of 100–700 kHz. The resonator frequencies are selected to form constructive interference when they are connected in parallel to increase the signal-to-noise ratio. Each resonator is comprised of a membrane that forms the mass and four beams that provide stiffness. The membrane size is kept the same for each resonator to have approximately the same sensitivity per frequency. The influence of spring elements on the resonant frequency and the sensitivity is numerically demonstrated. The sensor is manufactured using MEMSCAP PiezoMUMPs. The characterization experiments show a slight shift in the resonant frequency of individual resonators compared to the design values. The MEMS sensor is packaged using a custom-designed printed circuit board to improve the signal-to-noise ratio. The sensor performance is compared with a conventional AE sensor. The sensitivity and frequency bandwidth of the MEMS AE device is brought to a comparable level to bulky AE sensors.