Spectroscopic Characterization of Low-Temperature Grown GaAs Epitaxial Films
Spectroscopic Characterization of Low-Temperature Grown GaAs Epitaxial Films
复制标题
低温生长 GaAs 外延薄膜的光谱表征
DOI:
10.1143/jjap.33.4807
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发表时间:
1994
影响因子:
1.5
通讯作者:
N. Tsukada
中科院分区:
文献类型:
--
作者:
M. Tani;K. Sakai;H. Abe;S. Nakashima;H. Harima;M. Hangyo;Y. Tokuda;K. Kanamoto;Y. Abe;N. Tsukada
Femtosecond time-resolved reflectance and Raman scattering studies have been made on GaAs epitaxial layers grown at temperatures between 200 and 300° C and subsequently annealed. A subpicosecond carrier lifetime (∼0.25 ps) has been measured for a sample grown at 250° C and annealed at 600° C. Raman measurements using a back scattering geometry show a strong TO phonon band for samples grown at 200° C and 250° C, while it is absent for samples grown at 275 and 300° C. The band width of the LO band increases with decreasing growth temperature. A phonon band corresponding to As precipitates is also observed at 200 cm-1 for samples grown at 200 and 250° C. A strong correlation is found between the measured carrier lifetime and Raman profile.