New theoretical analysis of the LRRM calibration technique for vector network analyzers
New theoretical analysis of the LRRM calibration technique for vector network analyzers
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DOI：
10.1109/19.963202
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发表时间：
2001-10-01
影响因子：
5.6
通讯作者：
Pradell, L
中科院分区：
文献类型：
--
作者：
Purroy, F;Pradell, L
本文提出了四标准线反射匹配（LRRM）矢量网络分析仪（VNA）校准技术的新理论分析。结果表明，每当使用非理想标准时，通常无法定义参考阻抗（LRRM 校准所参考的）。基于此考虑，提出了一种确定晶圆上匹配标准的新算法，以提高LRRM校准精度。使用高达 40 GHz 的晶圆校准对新理论和算法进行了实验验证。
In this paper, a new theoretical analysis of the four-standards line-reflect-reflect-match (LRRM) vector network-analyzer (VNA) calibration technique is presented. As a result, it is shown that the reference-impedance (to which the LRRM calibration is referred) cannot generally be defined whenever nonideal standards are used. Based on this consideration, a new algorithm to determine the on-wafer match standard is proposed that improves the LRRM calibration accuracy. Experimental verification of the new theory and algorithm using on-wafer calibrations up to 40 GHz is given.