Vertical full-colour micro-LEDs via 2D materials-based layer transfer
Vertical full-colour micro-LEDs via 2D materials-based layer transfer
复制标题
通过基于2D材料的层转移的垂直全色微发光二极管
DOI：
10.1038/s41586-022-05612-1
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发表时间：
2023-02-02
期刊：
影响因子：
64.8
通讯作者：
Kim, Jeehwan
中科院分区：
文献类型：
--
作者：
Shin, Jiho;Kim, Hyunseok;Kim, Jeehwan
微发光二极管（μ LED）已被探索用于增强和虚拟现实显示应用，需要极高的每英寸像素和亮度（1，2）。然而，基于红色、绿色和蓝色（RGB）mu LED的横向组装的常规制造工艺在增强像素密度方面具有限制（3-6）。垂直mu LED显示器的最近示范已经尝试通过堆叠独立RGB LED膜和自顶向下制造来解决这个问题（7-14），但是堆叠的mu LED的横向尺寸的最小化一直是困难的。在这里，我们报告全彩色，垂直堆叠的mu LED，达到，据我们所知，最高的阵列密度（每英寸5,100像素）和最小的尺寸（4 μ m）报告的日期。这通过二维基于材料的层转移技术（15-18）来实现，该技术允许通过远程或货车德瓦尔斯外延、LED的机械释放和堆叠、随后自上而下的制造在二维材料涂覆的衬底上生长近亚微米厚度的RGB LED。约9 μ m的最小堆叠高度是创纪录的高mu LED阵列密度的关键推动因素。我们还展示了蓝色μ LED与硅膜晶体管的有源矩阵操作的垂直集成。这些结果为创建用于增强现实和虚拟现实的全彩色μ LED显示屏奠定了路线，同时还为更广泛类别的三维集成设备提供了一个可推广的平台。
Micro-LEDs (mu LEDs) have been explored for augmented and virtual reality display applications that require extremely high pixels per inch and luminance(1,2). However, conventional manufacturing processes based on the lateral assembly of red, green and blue (RGB) mu LEDs have limitations in enhancing pixel density(3-6). Recent demonstrations of vertical mu LED displays have attempted to address this issue by stacking freestanding RGB LED membranes and fabricating top-down(7-14), but minimization of the lateral dimensions of stacked mu LEDs has been difficult. Here we report full-colour, vertically stacked mu LEDs that achieve, to our knowledge, the highest array density (5,100 pixels per inch) and the smallest size (4 mu m) reported to date. This is enabled by a two-dimensional materials-based layer transfer technique(15-18) that allows the growth of RGB LEDs of near-submicron thickness on two-dimensional material-coated substrates via remote or van der Waals epitaxy, mechanical release and stacking of LEDs, followed by top-down fabrication. The smallest-ever stack height of around 9 mu m is the key enabler for record high mu LED array density. We also demonstrate vertical integration of blue mu LEDs with silicon membrane transistors for active matrix operation. These results establish routes to creating full-colour mu LED displays for augmented and virtual reality, while also offering a generalizable platform for broader classes of three-dimensional integrated devices.