Fabrication of Multilayers with Growth Controlled by Sequential Surface Chemical Reactions
Fabrication of Multilayers with Growth Controlled by Sequential Surface Chemical Reactions
复制标题
连续表面化学反应控制生长的多层膜的制造
DOI：
10.1143/jjap.33.7086
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
K. Obara
中科院分区：
文献类型：
--
作者：
H. Kumagai;M. Matsumoto;Y. Kawamura;K. Obara
通过三甲基铝/过氧化氢用于氧化铝层和四氯化钛/过氧化氢用于氧化钛层的顺序表面化学反应控制生长来制造氧化铝和氧化钛的多层。用透射电子显微镜和X射线衍射仪对多层膜进行了评价，结果表明，每层膜的厚度为1.6 nm，与设计值相等，第一个峰的全宽与峰中心角的比值（Δ2θ/2θ0）接近理论最小值。
A multilayer of aluminum oxide and titanium oxide was fabricated with growth controlled by sequential surface chemical reactions of trimethylaluminum/hydrogen peroxide for the aluminum oxide layer, and tetrachlorotitanium/hydrogen peroxide for the titanium oxide layer. Evaluation of the multilayer using a transmission electron microscope and an X-ray diffractometer indicated that the 1.6 nm thickness of each layer equaled the design value, and the ratio (Δ2θ/2θ0) of the full width of the first peak to the center angle of the peak was close to the theoretical minimum.