Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics: II. Radial distributions
Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics: II. Radial distributions
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DOI：
10.1088/0963-0252/16/3/011
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发表时间：
2006-02
影响因子：
3.8
通讯作者：
Z. Kiss’ovski;A. Brockhaus;D. Korzec;S. Kytzia;J. Engemann
中科院分区：
文献类型：
--
作者：
Z. Kiss’ovski;A. Brockhaus;D. Korzec;S. Kytzia;J. Engemann
在100 Pa的中性气压下，通过单Langmuir探针技术获得了缝隙天线（μSLAN）型微波等离子体源（频率2.45 GHz时P = 1000 W）产生的氧等离子体中参数的径向分布。结果表明，除了靠近壁的区域外，电子温度和等离子体电势对半径的依赖性很弱。电子浓度很大程度上取决于微波电场强度，并且随着半径的增加而增加。基于放电电磁场分布的数值模拟，讨论了等离子体参数的径向分布。应用了一种新型滤波器系统，用于无源补偿微波场对探头特性的影响。
Radial distributions of the parameters in oxygen plasmas generated by the slot antenna (µSLAN) type microwave plasma source (P = 1000 W at frequency 2.45 GHz) are obtained by the single Langmuir probe technique at a neutral gas pressure of 100 Pa. Results show that the electron temperature and the plasma potential have a weak dependence on the radius, except in the region close to the wall. The electron concentration strongly depends on the microwave electric field strength and it increases with the radius. Radial distributions of the plasma parameters are discussed on the basis of the numerical simulations of the electromagnetic field distribution in the discharge. A new type of filter system for a passive compensation of the effect of the microwave field on the probe characteristics is applied.