Accurate determination of terahertz optical constants by vector network analyzer of Fabry-Perot response.
Accurate determination of terahertz optical constants by vector network analyzer of Fabry-Perot response.
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DOI：
10.1364/ol.38.005438
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发表时间：
2013-12
期刊：
影响因子：
3.6
通讯作者：
Wen-feng Sun;Bin Yang;Xin-Ke Wang;Yan Zhang;R. Donnan
中科院分区：
文献类型：
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作者：
Wen-feng Sun;Bin Yang;Xin-Ke Wang;Yan Zhang;R. Donnan
我们提出了一种方法的基础上的法布里-珀罗模型，有效地和准确地估计晶片样品的光学常数，在传输的矢量网络分析仪（VNA）进行的测量。该方法是证明两个单独的晶圆样品：硅和聚甲基丙烯酸甲酯的其他之一。结果表明，该方法不仅可以在宽频域上准确、简单地获取光学常数，而且克服了现有方法对色散和有损耗材料计算的局限性，例如基于VNA驱动的准光学透射计和太赫兹时域光谱法。
We present a method based on a Fabry-Perot model to efficiently and accurately estimate optical constants of wafer samples in transmission-only measurements performed by a vector network analyzer (VNA). The method is demonstrated on two separate wafer samples: one of silicon and the other of polymethylmethacrylate. Results show that the method can not only acquire optical constants accurately and simply over a broad frequency domain but also overcome the limitations of calculation for dispersive and lossy materials to which existing methods are susceptible, such as those based on VNA-driven quasi-optical transmissometers and terahertz time-domain spectrometry.