Micromachined tools for nano technology. Twin nano-probes and nano-scale gap control by integrated microactuators
Micromachined tools for nano technology. Twin nano-probes and nano-scale gap control by integrated microactuators
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用于纳米技术的微加工工具。
DOI：
10.1109/memsys.2001.906536
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
K. Kakushima;M. Mita;D. Kobayashi;G. Hashiguchi;J. Endo;Y. Wada;H. Fujita
本文介绍了一种新型的双纳米探针组成的设备的制造和驱动。探针的尺寸为200 nm高，280 nm宽和5 μ m/m长，这是通过硅各向异性蚀刻形成的。当输入功率为101 mW时，探针与热膨胀微致动器之间的初始间隙约为400 nm，此时探针与热膨胀微致动器之间的初始间隙为84 nm。通过同时TEM观察证实了精确运动低至4 nm/mW。
This paper describes the fabrication and actuation of a novel device composed of twin nano probes. The size of the probes are 200 nm-high, 280 nm-wide and 5 /spl mu/m-long, which are formed by silicon anisotropic etching. The initial gap of about 400 nm between the probes become 84 nm when 101 mW input power was given to the thermal expansion micro actuators integrated with the probes. Precise motion down to 4 nm/mW was confirmed by simultaneous TEM observation.