Pull-in characterization of doubly-clamped composite beams
Pull-in characterization of doubly-clamped composite beams
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DOI：
10.1016/j.sna.2009.02.027
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发表时间：
2009-04-29
影响因子：
4.6
通讯作者：
Li, Weihua
中科院分区：
文献类型：
--
作者：
Nie, Meng;Huang, Qing-An;Li, Weihua
静电吸引束已广泛用于测量材料特性。近年来，对采用复合薄膜的 MEMS 器件的需求不断增加。本文提出了一种利用复合材料固定-固定梁组成的静电拉入测试结构来表征复合薄膜材料性能的方法。建立了组合双夹梁拉合电压的解析模型，该模型考虑了组合梁宽度方向横向残余应力的影响。基于该改进模型，设计了一种试验结构，以避免沿组合梁宽度方向的侧向残余应力的影响。报道了一种同时提取复合薄膜各层材料特性（杨氏模量和残余应力）的原位方法。并制造了带有多杯式锚的双夹紧表面微机械梁来支持吸合电压模型。通过有限元模拟和实验验证了提取方法的有效性和准确性。 (C) 2009 Elsevier B.V. 保留所有权利。
An electrostatic pull-in beam has been widely used to measure material properties. There has been an increasing need for MEMS devices with composite films in recent years. This paper presents an approach to characterize the material properties of the composite films using the electrostatic pull-in test structure which is composed of the composite fixed-fixed beam. An analytical model for the pull-in voltage of the composite doubly-clamped beam is presented, which takes into account the influence of lateral residual stress along width direction of the composite beam. Based on this improved model, a test structure is designed to avoid the influence of lateral residual stress along the width of the composite beam. An in situ method for simultaneously extracting material properties (Young's modulus and residual stress) of each layer for the composite films is reported. And doubly-clamped surface micromachined beams with multi-cup style anchors were fabricated to support the model of pull-in voltage. The validation and accuracy of the extracting method have been confirmed by FEM simulation and experiments. (C) 2009 Elsevier B.V. All rights reserved.