On-chip erbium-doped lithium niobate microring lasers
On-chip erbium-doped lithium niobate microring lasers
复制标题
片上掺铒铌酸锂微环激光器
DOI：
10.1364/ol.425178
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发表时间：
2021-07-01
期刊：
影响因子：
3.6
通讯作者：
Xu, Jingjun
中科院分区：
文献类型：
--
作者：
Luo, Qiang;Yang, Chen;Xu, Jingjun
绝缘体上钛酸锂（LNOI）由于其优异的非线性、电光等物理性能，被认为是光学集成的重要候选平台，已成为研究热点。光源作为集成光学系统的重要组成部分，是一个急需解决的问题。在这封信中，我们报告了实现1550 nm波段的片上LNOI微激光器的基础上，掺铒LNOI环形腔的加载质量因子高于100万在类似970 nm，这是通过使用电子束光刻和电感耦合等离子体反应离子刻蚀工艺制造。这些微激光器表现出类似于20 μ W的低泵浦阈值和在980 nm波段连续激光泵浦下的稳定性能。在高泵浦功率下，观察到了1510 ~ 1580 nm的梳状激光谱，为在掺稀土离子的LNOI平台上实现脉冲激光和频率梳奠定了基础。本函有效促进了片上集成有源LNOI器件的发展。(C)2021美国光学学会
Lithium niobate on insulator (LNOI), regarded as an important candidate platform for optical integration due to its excellent nonlinear, electro-optic, and other physical properties, has become a research hotspot. A light source, as an essential component for an integrated optical system, is urgently needed. In this Letter, we reported the realization of 1550 nm band on-chip LNOI microlasers based on erbium-doped LNOI ring cavities with loaded quality factors higher than 1 million at similar to 970 nm, which were fabricated by using electron beam lithography and inductively coupled plasma reactive ion etching processes. These microlasers demonstrated a low pump threshold of similar to 20 mu W and stable performance under the pump of a 980 nm band continuous laser. Comb-like laser spectra spanning from 1510 to 1580 nm were observed in a high pump power regime, which lays the foundation of the realization of pulsed laser and frequency combs on a rare-earth ion-doped LNOI platform. This Letter effectively promotes the development of on-chip integrated active LNOI devices. (C) 2021 Optical Society of America