Ultrasensitive WO3 gas sensors for NO2 detection in air and low oxygen environment
Ultrasensitive WO3 gas sensors for NO2 detection in air and low oxygen environment
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DOI：
10.1016/j.snb.2016.08.080
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发表时间：
2017-02-01
影响因子：
8.4
通讯作者：
Gardner, Julian W.
中科院分区：
文献类型：
--
作者：
Urasinska-Wojcik, Barbara;Vincent, Timothy A.;Gardner, Julian W.
我们在这里报告的结果的氧化钨为基础的低功率MEMS气体传感器的响应，以ppb的二氧化氮在低水平的环境氧气的研究。结果发现，电阻式气体传感器不仅对NO2具有高灵敏度（3.4%/ppb对商业MOX获得的0.2%/ppb），而且仍然可以在较低的氧气水平（低至0.5%）下可靠地运行-尽管响应和恢复时间略长。确定了最佳操作温度为约100 ℃。350摄氏度，因此很容易在基于MEMS的SOI CMOS衬底的范围内。该响应对环境湿度的显著变化敏感，但发现即使在高得多的ppm水平下对CO、氢气、甲烷和丙酮也具有低的交叉敏感性。我们相信，这些氧化钨气体传感器可用于恶劣的应用，即通常与燃烧系统废气相关的低氧（贫）环境。(C)2016爱思唯尔B. V.保留所有权利。
We report here on the results of a study into the response of a tungsten oxide based low power MEMS gas sensor to ppb of nitrogen dioxide at low levels of ambient oxygen. It was found that the resistive gas sensors not only had a high sensitivity to NO2 (3.4%/ppb vs. 0.2%/ppb obtained for commercial MOX) but can still operate reliably at lower oxygen levels (down to 0.5%) - albeit with slightly longer response and recovery times. The optimal operating temperature was determined to be ca. 350 degrees C and so easily within the range of a MEMS based SOI CMOS substrate. The response was sensitive to significant changes in ambient humidity, but was found to have low cross-sensitivity to CO, hydrogen, methane, and acetone even at much higher ppm levels. We believe that these tungsten oxide gas sensors could be exploited in harsh applications, i.e. with a low oxygen (lean) environment often associated in the exhaust gases from combustion systems. (C) 2016 Elsevier B.V. All rights reserved.