Fabrication and experiment of planar micro ion drag pump
Fabrication and experiment of planar micro ion drag pump
复制标题
平面微型离子拖曳泵的制作与实验
DOI：
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
Yong
中科院分区：
文献类型：
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作者：
Si;Yong
研制了一种在玻璃衬底上具有平面电极的微型离子拖曳泵。该泵由一个二维电极对阵列组成，由直流电压驱动，采用单极传导。乙醇泵在两个方向上，和流量和压力进行了测量，在通道的深度为100 /spl亩/米或200 /spl亩/米和宽度固定在3毫米。它被发现，泵可以很容易地制造，并在较低的成本比以前研究的微型离子拖曳泵。
A micro ion drag pump with planar electrodes on a glass substrate was fabricated and tested. The pump consisted of a 2-dimensional electrode pair array driven by DC voltage using unipolar conduction. Ethyl alcohol was pumped in both directions, and the flow rate and the pressure were measured, in channels of depth 100 /spl mu/m or 200 /spl mu/m and width fixed at 3 mm. It was found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated.