High Acid Corrosion Resistance of Nb2O5 Thin Film Deposited by Room Temperature ALD
High Acid Corrosion Resistance of Nb2O5 Thin Film Deposited by Room Temperature ALD
复制标题
室温ALD沉积Nb2O5薄膜的高耐酸腐蚀性能
DOI：
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发表时间：
2019
期刊：
影响因子：
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通讯作者：
Kazuki Yoshida; Kentaro Saito; Masanori Miura; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose
中科院分区：
文献类型：
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作者：
Taya Hidetoshi;Park Aaron;Cho Sungtae;Gubler Philipp;Hattori Koichi;Hong Juhee;Huang Xu-Guang;Lee Su Houng;Monnai Akihiko;Ohnishi Akira;Oka Makoto;Yang Di-Lun;Kazuki Yoshida; Kentaro Saito; Masanori Miura; Kensaku Kanomata; Bashir Ahmmad; Shigeru Kubota; Fumihiko Hirose
