A zipper RF MEMS tunable capacitor with interdigitated RF and actuation electrodes
A zipper RF MEMS tunable capacitor with interdigitated RF and actuation electrodes
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具有叉指式射频和驱动电极的拉链式射频 MEMS 可调谐电容器
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
Gabriel M. Rebeiz
中科院分区：
文献类型：
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作者：
R. Mahameed;M. El;Gabriel M. Rebeiz
本文提出了一种新的RF MEMS可调谐电容器的基础上的拉链的原则和交叉的RF和驱动电极。电极配置防止在高致动电压下的电介质充电。它还增加了电容比和可调模拟范围。残余应力对电容可调谐性的影响也进行了研究。在氧化铝衬底上制造具有不同叉指RF和致动电极的两个装置，并且在3GHz下产生约3.0（Cmin = 70-90 fF，Cmax = 240-270 fF）的电容比和Q > 100。该设计可用于宽带可调谐滤波器和匹配网络。
This paper presents a new RF MEMS tunable capacitor based on the zipper principle and with interdigitated RF and actuation electrodes. The electrode configuration prevents dielectric charging under high actuation voltages. It also increases the capacitance ratio and the tunable analog range. The effect of the residual stress on the capacitance tunability is also investigated. Two devices with different interdigital RF and actuation electrodes are fabricated on an alumina substrate and result in a capacitance ratio around 3.0 (Cmin = 70–90 fF, Cmax = 240–270 fF) and with a Q > 100 at 3 GHz. This design can be used in wideband tunable filters and matching networks.