Metallized DNA nanolithography for encoding and transferring spatial information for graphene patterning
Metallized DNA nanolithography for encoding and transferring spatial information for graphene patterning
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DOI：
10.1038/ncomms2690
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发表时间：
2013-04-01
影响因子：
16.6
通讯作者：
Strano, Michael S.
中科院分区：
文献类型：
--
作者：
Jin, Zhong;Sun, Wei;Strano, Michael S.
石墨烯和其他二维电子学的愿景是直接从单个前驱体片上生产纳米电子电路和屏障材料。DNA折纸和单链瓦片是在DNA序列中编码复杂形状的强大方法，但它们在其他纳米材料上的转化受到限制。在这里，我们开发了一种金属化DNA纳米光刻技术，允许空间信息转移到能够等离子蚀刻的二维纳米材料上。宽度、方向和曲率可以通过特定的序列设计编程并转移，正如我们在石墨烯中所演示的那样。空间分辨率受限于DNA模板在Au金属化和随后蚀刻时的畸变。金属化DNA掩膜允许底层石墨烯的等离子体增强拉曼光谱，提供有关缺陷，掺杂和晶格对称性的信息。这种DNA纳米光刻技术使二维电子材料的晶圆级图像化能够创建各种电路元件，包括纳米环、三元和四元纳米结以及扩展的纳米带。
The vision for graphene and other two-dimensional electronics is the direct production of nanoelectronic circuits and barrier materials from a single precursor sheet. DNA origami and single-stranded tiles are powerful methods to encode complex shapes within a DNA sequence, but their translation to patterning other nanomaterials has been limited. Here we develop a metallized DNA nanolithography that allows transfer of spatial information to pattern two-dimensional nanomaterials capable of plasma etching. Width, orientation and curvature can be programmed by specific sequence design and transferred, as we demonstrate for graphene. Spatial resolution is limited by distortion of the DNA template upon Au metallization and subsequent etching. The metallized DNA mask allows for plasmonic enhanced Raman spectroscopy of the underlying graphene, providing information on defects, doping and lattice symmetry. This DNA nanolithography enables wafer-scale patterning of two-dimensional electronic materials to create diverse circuit elements, including nanorings, three-and four-membered nanojunctions, and extended nanoribbons.