An Electron-Cyclotron-Resonance Plasma as a Source of Multiply Charged Ions
An Electron-Cyclotron-Resonance Plasma as a Source of Multiply Charged Ions
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作为多电荷离子源的电子回旋共振等离子体
DOI：
10.1109/tns.1976.4328391
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发表时间：
1976
影响因子：
1.8
通讯作者：
K. Wiesemann
中科院分区：
文献类型：
--
作者：
K. Bernhardi;G. Fuchs;M. Goldman;H. Herbert;W. Walcher;K. Wiesemann
电子回旋共振 (ECR) 等离子体（3 cm 微波，高达 2.4 kW）的特性已得到研究。从 1 毫米直径的容器中总共提取了 80 A 惰性气体离子流。到目前为止的洞。电荷态分布显示最大值高于 1+ 态，表明多重碰撞电离是主要过程。测量了 X 射线光谱、鞘层电势和微波反射，以获得对放电的一些物理了解。讨论了我们的设备作为离子源的适用性。
The properties of an electron-cyclotron-resonance (ECR) plasma (3 cm microwaves up to 2.4 kW) have been investigated. A total of 80 ¿A noble gas ion current has been extracted from a 1 mm dia. hole so far. The charge state distributions show a maximum above the 1+ state, indicating that multiple impact ionization is a dominant process. X-ray spectra, sheath potential and microwave reflection were measured to gain some physical understanding of the discharge. The applicability of our device as an ion source is discussed.