Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology
Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology
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DOI：
10.1126/sciadv.aay4508
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发表时间：
2020-01-01
期刊：
影响因子：
13.6
通讯作者：
Li, Xiuling
中科院分区：
文献类型：
--
作者：
Huang, Wen;Yang, Zhendong;Li, Xiuling
mtesla 至 Tesla 级别的单片强磁感应为物理、化学和医疗系统提供了基本功能。当前的设计选项受到三维 (3D) 结构构造、电流处理和磁性材料集成方面现有能力的限制。我们在这里报告了通过气相自卷膜（S-RuM）纳米技术，结合通过毛细力对铁磁流体磁性材料进行后卷集成，将大面积且相对较厚（类似于100至250 nm）的2D纳米膜几何转变为多圈3D空芯微管。设计并测试了数百个蓝宝石上的S-RuM功率电感，最大工作频率超过500 MHz。单个微管电感器在 10kHz 时实现了 1.24μH 的电感，相应的面积和体积电感密度分别为 3μH/mm(2) 和 23μH/mm(3)。在 10 MHz 下制造的器件中，模拟的磁感应强度达到数十 mtesla。
Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (similar to 100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 mu H at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 mu H/mm(2) and 23 mu H/mm(3), respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.