A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges
A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges
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DOI：
10.1299/jamdsm.4.976
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发表时间：
2010
影响因子：
0.9
通讯作者：
Y. Kurisaki;H. Sawano;Hayato Yoshioka;H. Shinno
中科院分区：
文献类型：
--
作者：
Y. Kurisaki;H. Sawano;Hayato Yoshioka;H. Shinno
精密运动控制技术已广泛应用于先进科学仪器和半导体制造设备等高精度应用。特别是精密工程领域需要大行程多自由度定位的纳米运动控制系统。为了实现这样的系统，开发基于新设计理念的平面运动台系统是必要且不可或缺的。本文提出了一种新开发的大行程X-Y平面纳米运动工作台系统。该系统由精动工作台和粗动机构组成。精细运动台由多孔空气静压轴承支撑，并由音圈电机驱动，并在完美的非接触条件下带有激光干涉仪反馈。此外，工作台在 X-Y 平面运动期间在重心处被驱动。粗动机构为框架结构，微动工作台采用音圈电机线圈。为了扩大工作台行程范围，粗动机构跟随工作台微调运动。性能评估结果证实，所开发的工作台系统具有卓越的性能，包括大行程范围内的纳米定位能力。
Precision motion control technology has been widely used in high accuracy applications such as advanced scientific instruments and semiconductor fabrication equipment. In particular, the nano-motion control system with multiple degrees of freedom positioning in large travel ranges has been required in the field of precision engineering. In order to realize such a system, it is necessary and indispensable to develop a planar motion table system based on a new design concept. This paper presents a newly developed X-Y planar nano-motion table system with large travel ranges. This system is composed of a fine motion table and a coarse motion mechanism. The fine motion table is supported by porous aerostatic bearings and driven by voice coil motors with a laser interferometer feedback in a perfect non-contact condition. In addition, the table is driven at the center of gravity during the X-Y planar motion. The coarse motion mechanism has the frame structure with the coils of voice coil motors for the fine motion table. In order to enlarge the table travel ranges, the coarse motion mechanism follows the fine table motion. Performance evaluation results confirm that the developed table system has a remarkable performance which includes nanometer positioning capability over large travel ranges.