Hydraulic microactuator with coarse/fine drive-switching mechanism

Hydraulic microactuator with coarse/fine drive-switching mechanism
复制标题

具有粗调/微调驱动切换机构的液压微执行器

DOI:
10.1016/j.sna.2021.113082
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发表时间:
2021
期刊:
Sensors and Actuators: A. Physical
影响因子:
--
通讯作者:
Tadashi Ishida
Tadashi Ishida
中科院分区:
--
文献类型:
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作者:
Gai Yamauchi;Tadashi Ishida

文献摘要

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为了对微流控设备中的细胞进行精确的物理和化学分析,它们应该位于微通道壁上的传感器附近。为了精确地将细胞运送到传感器附近,开发了具有粗/精驱动切换机构的液压微致动器。微致动器具有带微柱的可移动薄膜,并且通过微柱的接触将驱动模式切换到微通道壁中。在微致动器中,通过切换驱动模式实现了对薄膜上的细胞朝向微通道壁的位置的粗略接近和精细调整。使用二维快速傅立叶变换图像获得的聚焦度,以1 μm的分辨率测量微致动器的位移。使用微致动器实现的粗到细驱动模式的位移比为13.9。使用微致动器,蓝藻被引入到装置中,并在粗驱动模式下从微通道的底部到顶部运输53 µm,并且在细驱动模式下精确地调整蓝藻在微通道壁附近的位置。
For precise physical and chemical analyses of cells in microfluidic devices, they should be located near the sensors on a microchannel wall. To transport cells close to the sensors precisely, a hydraulic microactuator with a coarse/fine drive-switching mechanism was developed. The microactuator has a movable thin film with micropillars, and switches drive modes through the contacts of the micropillars into a microchannel wall. A coarse approach and a fine adjustment of the position of cells on the thin film toward the microchannel wall by switching the drive modes was achieved in the microactuator. The displacement of the microactuator was measured at 1 µm resolution using the focus degrees obtained using the two-dimensional fast Fourier transformed images. The displacement ratio of the coarse to fine drive mode achieved using the microactuator was 13.9. Using the microactuator, cyanobacteria were introduced into the device and were transported 53 µm from the bottom to the top of the microchannel in the coarse drive mode, and the position of the cyanobacteria was precisely adjusted near the microchannel wall in the fine drive mode.