Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
复制标题
采用高温共烧陶瓷 MEMS 技术制造的无线压力传感器的测量
DOI：
10.1631/jzus.c12mnt04
复制
发表时间：
2013-04-01
影响因子：
--
通讯作者：
Tan, Qiu-lin
中科院分区：
文献类型：
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作者：
Xiong, Ji-jun;Zheng, Shi-jun;Tan, Qiu-lin
高温共烧陶瓷（HTCC）具有广泛的应用和稳定的机械性能，但尚未用于制造传感器。通过引入无线遥测传感器系统和嵌入压力可变形腔的陶瓷结构，制造了由HTCC材料（氧化锆和96%氧化铝）制成的设计传感器，并使用无线询问方法测试了其压力测量能力。使用制造的传感器，进行了测量密封容器中的大气压力的研究。该装置的实验灵敏度在0.5 MPa以下氧化锆为2 Hz/Pa，氧化铝为1.08 Hz/Pa，读出距离为2.5 cm。所述传感器技术可用于监测大气压力，以评估恶劣环境下的重要部件参数。
High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.