Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe: "Conformal and Anisotropic Deposition of Cu in Trenches by using H-Assisted Plasma CVD Method"Proc.International Symposium on Information Science and Electrical Engineer
Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe: "Conformal and Anisotropic Deposition of Cu in Trenches by using H-Assisted Plasma CVD Method"Proc.International Symposium on Information Science and Electrical Engineer
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Kosuke Takenaka、Manabu Takeshita、Kazunori Koga、Masaharu Shiratani、Yukio Watanabe：“利用 H 辅助等离子体 CVD 方法在沟槽中进行 Cu 的保形和各向异性沉积”Proc.International Symposium on Information Science and Electrical Engineer
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