Dynamics and response of a humidity sensor based on a Love wave device incorporating a polymeric layer
Dynamics and response of a humidity sensor based on a Love wave device incorporating a polymeric layer
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基于包含聚合物层的乐夫波器件的湿度传感器的动力学和响应
DOI：
10.1016/j.snb.2014.07.095
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发表时间：
2014-12-01
影响因子：
8.4
通讯作者：
Wang, Lijun
中科院分区：
文献类型：
--
作者：
Liu, Jiansheng;Wang, Lijun
在这项研究中，我们研究了基于聚合物涂层乐夫波器件的湿度传感器的动力学和响应。对压电基底上粘弹性层层状结构中乐夫波的理论模型进行了综述。对聚合物涂层装置的质量速度灵敏度和质量损失灵敏度进行了数值说明。引入BET方程及其改进方程来描述气体在探测器表面的吸附机理。介绍了计算聚合物层表面积的方法，证明聚合物层是多孔材料。对基于Love波器件的湿度传感器进行了实验，该器件由两个28μm周期叉指换能器、0.47μm厚的PVA层和ST-90(圆形)X石英基板组成。使用网络分析仪测量乐福波器件的工作频率和插入损耗；通过比较由单层水分子引起的拟合频移和理论频移，计算PVA层的相对表面积。频移和插入损耗增量显示为相对湿度的函数；理论曲线与实验结果吻合较好。 (C) 2014 Elsevier B.V. 保留所有权利。
In this study, we investigate the dynamics and response of a humidity sensor based on a polymer-coated Love wave device. A review is presented for the theoretical model of Love waves in a layered structure with a viscoelastic layer on a piezoelectric substrate. Numerical illustrations are executed for the mass velocity sensitivity and mass loss sensitivity of a polymer-coated device. The BET equation and its improved equation are introduced to describe the adsorption mechanism of gas on the detector surface. A method is introduced for calculating the surface area of the polymer layer, which is proved a porous material. An experiment is performed for a humidity sensor based on a Love wave device consisting of two 28 mu m-periodic interdigital transducers, a 0.47 mu m-thick PVA layer, and an ST-90(circle) X quartz substrate. The operation frequency and insertion loss of the Love wave device are measured by using a network analyzer; the relative surface area of the PVA layer is calculated through comparing the fitted and the theoretical frequency shift caused by the monolayer of water molecules. The frequency shifts and insertion loss increments are shown as functions respect to the relative humidity; the theoretical curves agree well the experimental results. (C) 2014 Elsevier B.V. All rights reserved.