Nanoscale pattern formation produced by ion bombardment of a rotating target: The decisive role of the ion energy
Nanoscale pattern formation produced by ion bombardment of a rotating target: The decisive role of the ion energy
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DOI：
10.1103/physreve.107.014801
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发表时间：
2023-01-17
影响因子：
2.4
通讯作者：
Pearson, Daniel A.
中科院分区：
文献类型：
--
作者：
Bradley, R. Mark;Pearson, Daniel A.
我们研究的纳米级图案，形成在旋转的样品的元素材料的表面上，被轰击与广泛的惰性气体离子束的入射角为0以上的临界角为图案形成0c。图案的形成关键取决于离子能量E。在溅射可以忽略不计的低能量状态下进行的模拟中，我们发现了随时间变粗的纳米级土丘（纳米点）的无序阵列。纳米点的无序阵列也形成在高能量状态，其中有大量的溅射，但没有粗化发生接近阈值角。最后，对于刚好高于溅射产率阈值的E值，具有非凡程度的六方有序的纳米点阵列对于一系列参数值出现，即使存在线性不稳定波长的宽带。这一发现可能被证明是有用的应用程序中，高度有序的纳米级图案是必要的。
We study the nanoscale patterns that form on the surface of a rotating sample of an elemental material that is bombarded with a broad noble gas ion beam for angles of incidence 0 just above the critical angle for pattern formation 0c. The pattern formation depends crucially on the ion energy E. In simulations carried out in the low -energy regime in which sputtering is negligible, we find disordered arrays of nanoscale mounds (nanodots) that coarsen in time. Disordered arrays of nanodots also form in the high-energy regime in which there is substantial sputtering, but no coarsening occurs close to the threshold angle. Finally, for values of E just above the sputter yield threshold, nanodot arrays with an extraordinary degree of hexagonal order emerge for a range of parameter values, even though there is a broad band of linearly unstable wavelengths. This finding might prove to be useful in applications in which highly ordered nanoscale patterns are needed.