Reforming of Thermally Oxidized Film on GaN by Annealing with High-Temperature and High-Pressure Water

Reforming of Thermally Oxidized Film on GaN by Annealing with High-Temperature and High-Pressure Water
复制标题

高温高压水退火对GaN热氧化膜的改性

DOI:
--
复制
发表时间:
2015
期刊:
影响因子:
--
通讯作者:
Yukiharu Uraoka
Yukiharu Uraoka
中科院分区:
--
文献类型:
--
作者:
Yuki Tada;Masahiro Horita;Koji Yoshitsugu;Yasuaki Ishikawa;Yukiharu Uraoka

文献摘要

相似文献