Zinc oxide nanowire electromechanical oscillator
Zinc oxide nanowire electromechanical oscillator
复制标题
氧化锌纳米线机电振荡器
DOI：
10.1016/j.sna.2008.07.018
复制
发表时间：
2009-09-24
影响因子：
4.6
通讯作者：
Ye, Xiongying
中科院分区：
文献类型：
--
作者：
Zhu, Rong;Wang, Dingqu;Ye, Xiongying
本文报道了一种新型纳米机电振荡器，该振荡器使用悬挂在两个微加工金属电极上的单个半导体氧化锌 (ZnO) 纳米线。该振荡器由静电驱动产生运动，该运动基于场效应晶体管 (FET) 原理和锁定检测方法进行自我检测。建立连续介质机电模型，实现对振荡器的理论分析。对设备进行了初步的实验测量。实验结果表明，该振荡器的谐振频率为数十MHz，在双频点处观察到电流响应的两个谐振峰。振荡器的电流响应可以通过调节交流和直流栅极和源极-漏极电压来调节。与其他报道的纳米机电振荡器相比，我们基于单根氧化锌纳米线的振荡器具有增强的机电性能。这些优点大大增强了装置的实用性。该器件可潜在应用于执行器和传感器。 (C) 2008 Elsevier B.V. 保留所有权利。
This paper reports a novel nanoelectromechanical oscillator by using a single semiconducting zinc oxide (ZnO) nanowire that is suspended across on two micromachined metal electrodes. The oscillator is electrostatic-driven into a motion that is self-detected based on a field effect transistor (FET) principle and a lock-in detection method. A continuum electromechanical model is established to realize a theoretical analysis on the oscillator. The primary experimental measurements on the devices are performed. The experimental results show that the oscillator is with a resonant frequency of tens of MHz and two resonance peaks of the current response at double frequency points are observed. The current response of the oscillator can be adjusted through tuning AC and DC gate and source-drain voltages. Compared with other reported nanoelectromechanical oscillators, our oscillator based on a single ZnO nanowire is provided with an enhanced electromechanical performance. The merits significantly enhance the device's practicability. The device can be potentially applied for actuators and sensors. (C) 2008 Elsevier B.V. All rights reserved.