Comparison of Surface Roughness Estimations by X-ray Reflectivity Measurements and TEM observations
Comparison of Surface Roughness Estimations by X-ray Reflectivity Measurements and TEM observations
复制标题
通过 X 射线反射率测量和 TEM 观察进行表面粗糙度估计的比较
DOI：
10.1088/1757-899x/24/1/012008
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
Y. Fujii
中科院分区：
文献类型：
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作者：
Y. Fujii
通过 X 射线反射率测量对表面和界面粗糙度的估计与 TEM 和 AFM 观察的结果进行了比较。 X射线反射率是根据Parratt形式计算的，并通过Nevot-Croce理论解释了粗糙度的影响。 X 射线反射率测量估计的表面和界面粗糙度与 TEM 图像观察结果不符。这种分歧表明 Nevot 和 Croce 引入的修正菲涅尔反射系数不能应用于具有较大粗糙度的表面和界面。此外，计算结果显示出一个奇怪的现象，即在特定表面粗糙度的情况下，由于干涉效应而导致的振荡幅度增大。这个奇怪的结果表明，如何将粗糙度的影响添加到帕拉特形式主义中存在严重的问题。 Nevot 和 Croce 对菲涅耳系数的修改仅用于表面和界面反射。然而，当表面或界面粗糙度较大时，透射系数的修改具有重要作用，计算中不应忽略粗糙度引起的漫散射的影响。无论粗糙度的大小如何，这都是一个基本问题。在帕拉特形式主义中不准确地添加菲涅尔反射系数会导致这种分歧和奇怪的结果，因此粗糙度的影响被适当地纳入 X 射线反射率的理论公式中。在本文中，我们仅描述这些问题。对这个问题的进一步研究将在其他地方报道，我们提出了一种新的形式来导出具有表面和界面粗糙度的系统的 X 射线反射率。
Estimations of surface and interfacial roughness by x-ray reflectivity measurements were compared with those from TEM and AFM observations. The x-ray reflectivity was calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot-Croce. Estimated surface and interface roughnesses from the x-ray reflectivity measurements did not correspond to the TEM image observation results. This disagreement suggests that the modified Fresnel reflectance coefficient introduced by Nevot and Croce cannot be applied for a surface and interface having a large degree of roughness. In addition, the calculated result showed a strange phenomenon in that the amplitude of the oscillation due to interference effects increases in the case of a specific roughness of the surface. This strange result suggests that there is a serious problem in how the effect of the roughness is added to the Parratt formalism. The modification of Nevot and Croce for Fresnel coefficients has been used for only surface and interface reflection. However, the modification of the transmission coefficients has an important role when the roughness of the surface or interface is large, and the effect of diffuse scattering due to the roughness should not be ignored in the calculation. This is an essential problem regardless of the size of the roughness. An inaccurately addition of the Fresnel reflectance coefficient to the Parratt formalism causes this disagreement and strange result, and therefore the effect of roughness was properly incorporated into the theoretical formulation of the x-ray reflectivity. In this paper, we only describe these problems. Further investigation of this problem will be reported elsewhere where we propose a new formalism to derive the x-ray reflectivity for systems having surface and interfacial roughness.
SCIENCE（会议杂志第 31 系列（2006））2005 年 9 月 1-3 日，日本东京
DOI：
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发表时间：
2006
期刊：
影响因子：
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作者：
ed.Kei-ichi Maeda;Shoichi Yamada;Tsuneaki Daishido
通讯作者：
Tsuneaki Daishido