Nitrogen doped effect of structure and optical properties of TiO_2 films deposited by reactive facing targets sputtering
Nitrogen doped effect of structure and optical properties of TiO_2 films deposited by reactive facing targets sputtering
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氮掺杂对反应靶溅射TiO_2薄膜结构和光学性能的影响
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
M. F. Hossain
中科院分区:
文献类型:
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作者:
T. Takahashi;S. Biswas;T. Nezuka;M. F. Hossain