Wavelength-shift speckle interferometry for absolute profilometry using a mode-hop free external cavity diode laser
Wavelength-shift speckle interferometry for absolute profilometry using a mode-hop free external cavity diode laser
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使用无跳模外腔二极管激光器进行绝对轮廓测量的波长位移散斑干涉测量法
DOI：
10.1080/09500349708230752
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发表时间：
1997
影响因子：
1.3
通讯作者：
P. Haible
中科院分区：
文献类型：
--
作者：
H. Tiziani;B. Franze;P. Haible
摘要：在本文中，我们提出了一种使用具有外腔的可调谐二极管激光器进行绝对表面形貌测量的方法，该激光器的调谐范围高达 25 nm，无跳模，并且整个范围内的调谐速度低于 1 s。利用这种激光器，实现了绝对波长位移散斑图案干涉仪，能够测量光学光滑和粗糙表面。我们简要解释了工作原理以及无模式跳跃的波长调谐的重要性。我们讨论了波长位移散斑轮廓测量的能力、可能的测量范围和一些结果以及校准方法。
Abstract In this paper we present an absolute surface topography measurement with a tuneable diode laser with an external cavity that has a tuning range of as much as 25 nm without mode hops and a very high tuning speed of less than 1 s for the whole range. With this laser, an absolute wavelength-shift speckle pattern interferometer was realized, capable of measuring optically smooth and rough surfaces. We briefly explain the principles of operation, and the importance of wavelength tuning without mode hops. We discuss the capabilities, possible measuring ranges and some results as well as calibration methods of wavelength-shift speckle profilometry.