Development of fiber-optical microsensors for geophysical use
Development of fiber-optical microsensors for geophysical use
复制标题
地球物理用光纤微传感器的开发
DOI：
10.1109/ssc.2003.1224169
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Shindo
中科院分区：
文献类型：
--
作者：
H. Asanuma;S. Hashimoto;S. Tano;S. Takashima;H. Niitsuma;Y. Shindo
仅提供摘要表格。近十年来，与微电子机械系统(MEMS)相关的技术有了长足的进步，并利用MEMS技术开发出了各种微型传感器。微传感器在体积、重量、灵敏度、可移动性和成本等方面都优于传统传感器，因此有可能极大地改善地球物理仪器的性能。日本仙台东北大学环境研究所的研究人员自1993年以来一直在地下微传感项目下开发用于地球物理的微型传感器。微型传感器可以广泛应用于地球物理勘探、测井、地震观测、防灾和结构完整性评估等领域。在这张海报中，作者展示了微型光纤水听器和光学加速度计的原理。利用MEMS技术制作了一种由光纤边缘的半镜和全镜组成的法布里-珀罗涉仪，用于测量水中的动压和加速度。文中给出了设计思想、制造工艺、性能及未来发展计划。
Summary form only given. Technologies related to the micro electromechanical systems (MEMS) has been remarkably progressed in this decade, and various kinds of microsensors have been developed using the MEMS technologies. Microsensors have a potential to drastically improve the geophysical instrumentation, because they have advantages in size, weight, sensitivity, mobility, and cost to the conventional sensors. Researchers in Graduate School of Environmental Studies, Tohoku University, Sendai, Japan, have been developing microsensors for geophysical use under the subsurface microsensing project since 1993. The microsensors can be employed in wide area including geophysical exploration, logging, seismic observation, prevention of disaster, and evaluation of structural integrity etc. In this poster presentation, the authors show principles behind a miniaturized fiber-optic hydrophone and an optical accelerometer. A Fabri-Perot interferometer, which consists of a half mirror at the edge of optical fiber and a full mirror on diaphragm, is fabricated using the MEMS technologies for the detection of dynamic pressure in water and acceleration in both sensors. The design concept, fabrication process, performance and future development plan are shown.