Simulation-based verification of the shape measurement mechanism of micro structures beyond the diffraction limit using speckle interferometry
Simulation-based verification of the shape measurement mechanism of micro structures beyond the diffraction limit using speckle interferometry
复制标题
利用散斑干涉法对超出衍射极限的微结构形状测量机制进行仿真验证
DOI：
10.1080/09500340.2021.2024901
复制
发表时间：
2022
影响因子：
1.3
通讯作者：
Arai Yasuhiko
中科院分区：
文献类型：
--
作者：
Arai Yasuhiko
已经提出了一种可以测量超出透镜衍射极限的三维形状的方法，该方法不需要像在传统处理中那样聚焦在被测物体的图像上。在该方法中，可以通过高分辨率检测散斑图案的相变量来测量微结构的形状，该散斑图案具有对象的横向移位。在这项研究中，通过计算机模拟研究了该方法的测量机理。研究发现，利用散射光作为照明光源，将理想的光学系统与散斑干涉法相结合，实现了散斑干涉测量。并用实际光学系统验证了仿真结果的有效性。
A method that can measure three-dimensional shapes beyond the diffraction limit of a lens has been proposed that does not require focusing on an image of the measured object, as in traditional processing. In this method, the shape of the microstructure can be measured by high-resolution detection of the amount of phase change of the speckle pattern with a lateral shift of the object. In this study, the measurement mechanism of the method was investigated using computer simulations. It was found that the measurement is realized by a combination of the perfect optical system and speckle interferometry using the scattered light as the illumination light. In addition, the validity of the simulation results was verified using a real optical system.