A novel 3D deformation measurement method under optical microscope for micro-scale bulge-test
A novel 3D deformation measurement method under optical microscope for micro-scale bulge-test
复制标题
一种新颖的光学显微镜下 3D 变形测量方法，用于微尺度凸出测试
DOI：
10.1016/j.optlaseng.2017.07.001
复制
发表时间：
2017
影响因子：
4.6
通讯作者：
Huimin Xie
中科院分区：
文献类型：
--
作者：
Dan Wu;Huimin Xie
提出了一种结合光学显微镜的微尺度三维变形测量方法。该方法是基于光栅和相移算法。通过从两个对称角度记录变形前后的光栅图像，计算光栅图案的相位，可以从光栅图案的相位中提取出试样的三维变形场。将该方法应用于微尺度胀形试验。研制了与超深显微镜配套的微尺度热力耦合胀形试验装置。利用制作在薄膜上的光栅，可以可靠地测量薄膜的形变形貌。实验结果表明，所提出的方法和开发的膨胀测试装置可以用来表征薄膜的热/力学性能在微观尺度上成功。
A micro-scale 3D deformation measurement method combined with optical microscope is proposed in this paper. The method is based on gratings and phase shifting algorithm. By recording the grating images before and after deformation from two symmetrical angles and calculating the phases of the grating patterns, the 3D deformation field of the specimen can be extracted from the phases of the grating patterns. The proposed method was applied to the micro-scale bulge test. A micro-scale thermal/mechanical coupling bulge-test apparatus matched with the super-depth microscope was exploited. With the gratings fabricated onto the film, the deformed morphology of the bulged film was measured reliably. The experimental results show that the proposed method and the exploited bulge-test apparatus can be used to characterize the thermal/mechanical properties of the films at micro-scale successfully.