Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques
Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques
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DOI：
10.1088/0963-0252/2/4/006
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发表时间：
1993-11
影响因子：
3.8
通讯作者：
V. Vahedi;G. Dipeso;C. Birdsall;M. Lieberman;T. Rognlien
中科院分区：
文献类型：
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作者：
V. Vahedi;G. Dipeso;C. Birdsall;M. Lieberman;T. Rognlien
粒子蒙特卡罗模拟已经成为研究等离子体加工，特别是电容性射频放电的一个非常有效的工具。我们描述了传统的粒子在细胞（PIC）的模拟和它的局限性，在计算效率方面，审查隐式子循环方法，用于提高计算效率的许多问题，并分析了常规和隐式子循环PIC模拟性能的RF放电模型。在我们的有界一维静电代码，PDP的隐式子循环计划的实施，导致在一个数量级减少的模拟运行时间时，满足精度条件。
Particle-in-cell Monte Carlo simulation has become a very effective tool in exploring processing plasmas and in particular capacitive RF discharges. We describe the conventional particle-in-cell (PIC) simulation and its limitations in terms of computational efficiency, review the implicit subcycling methods used to improve computational efficiency for many problems, and analyse conventional and implicit subcycling PIC simulation performances on an RF discharge model. Implementation of the implicit subcycling scheme in our bounded one-dimensional electrostatic code, PDP, resulted in an order of magnitude reduction in the simulation run time when the accuracy conditions were satisfied.