Verification of high efficient broad beam cold cathode ion source.
Verification of high efficient broad beam cold cathode ion source.
复制标题
高效宽束冷阴极离子源验证。
DOI：
10.1063/1.4960394
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
A. Ashour
中科院分区：
文献类型：
--
作者：
A. M. Abdel reheem;M. Ahmed;M. M. Abdelhamid;A. Ashour
设计并构造了一种改进的冷阴极离子源。它由不锈钢空心圆柱体阳极和不锈钢阴极盘组成，两者由特氟龙法兰隔开。用氩气、氮气和氧气测量了不同压力下的放电和输出特性。研究了离子出口孔径形状和离子集电板与阴极盘之间的最佳距离。利用栅格出口孔径获得了稳定的放电电流和最大的离子束输出电流。结果表明，离子收集器与离子出口孔径之间的最佳距离为6.25 cm。采用冷阴极离子源，以600 μA的氩离子束电流在AZ31镁合金表面沉积铝涂层。扫描电子显微镜和x射线衍射技术用于表征铝沉积前后的样品。
An improved form of cold cathode ion source has been designed and constructed. It consists of stainless steel hollow cylinder anode and stainless steel cathode disc, which are separated by a Teflon flange. The electrical discharge and output characteristics have been measured at different pressures using argon, nitrogen, and oxygen gases. The ion exit aperture shape and optimum distance between ion collector plate and cathode disc are studied. The stable discharge current and maximum output ion beam current have been obtained using grid exit aperture. It was found that the optimum distance between ion collector plate and ion exit aperture is equal to 6.25 cm. The cold cathode ion source is used to deposit aluminum coating layer on AZ31 magnesium alloy using argon ion beam current which equals 600 μA. Scanning electron microscope and X-ray diffraction techniques used for characterizing samples before and after aluminum deposition.