A reproducible electropolishing technique to customize tungsten SPM probe: From mathematical modeling to realization
A reproducible electropolishing technique to customize tungsten SPM probe: From mathematical modeling to realization
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DOI：
10.1016/j.jmatprotec.2012.08.004
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发表时间：
2013
影响因子：
6.3
通讯作者：
Yaozheng Ge;Wei Zhang;Yuan-Liu Chen;Chao Jin;Bingfeng Ju
中科院分区：
文献类型：
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作者：
Yaozheng Ge;Wei Zhang;Yuan-Liu Chen;Chao Jin;Bingfeng Ju
本工作的目的是为电化学刻蚀过程开发一种优化的电化学抛光技术，从数学模型到制备好的钨SPM探针的最终实现。基于有界界面的轴对称形状，导出了一种逐次逼近的计算格式，该格式便于数值求解覆盖大多数实际情况的较大范围的参数值。实验证明，所提出的电化学刻蚀技术和工艺对于稳定的触头轮廓、超尖的尖端半径和高的生产重复性具有优势。制作了指数型、圆锥型、多直径、针形轮廓稳定、尖端半径超尖的钨探头。还可以很好地确定探头的特征参数，包括长度、长宽比和尖端半径。这种可重复的技术为高质量的金属扫描探针的批量定制开辟了一条道路。
The present work is carried out with the aim of developing an optimized electropolishing technique for the process of electrochemical etching from mathematical modeling to the final realization of the well-prepared tungsten SPM probes. Based on the axisymmetric shapes of bounded interfaces, a calculation scheme of successive approximation is derived, which facilitates the numerical solutions for a wide range of parameter values which will cover most practical situations. The proposed art of electrochemical etching technique and process are experimentally confirmed to have advantages for the tungsten probe fabrication of the stabilized stylus contour, ultra-sharp apex radius and high production reproducibility. The tungsten probes with profiles of exponential, conical, and multi-diameter with stabilized stylus contour, and ultra-sharp apex radius are fabricated. The characteristic parameters of the probe including length, aspect ratio and tip apex radius can also be well defined. The reproducible technique opens a way of batch customization of metallic SPM probes with high quality.