Characterization of WO3 thin films prepared by picosecond laser deposition for gas sensing
Characterization of WO3 thin films prepared by picosecond laser deposition for gas sensing
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DOI：
10.1016/j.snb.2017.03.096
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发表时间：
2017-09-01
影响因子：
8.4
通讯作者：
Seidel, Helmut
中科院分区：
文献类型：
--
作者：
Preiss, Elisabeth M.;Krauss, Andreas;Seidel, Helmut
在这项研究中，我们报告的调查的气敏性能的WO 3薄膜沉积的ps脉冲激光沉积。形态，电气和气体传感性能相对于CO和NO2的比较，不同的层与增加孔隙率，增加沉积过程中的氧气压力。在环境条件下的基极电阻进行了研究，发现是高度依赖于形态，控制的晶粒-晶粒接触。我们发现高度多孔的薄膜对NO2和CO也显示出高电阻响应。（C）2017 Elsevier B. V.保留所有权利。
In this study we report on an investigation of the gas sensing properties of WO3 thin films deposited by ps-pulsed laser deposition. Morphological, electrical and gas sensing properties with respect to CO and NO2 are compared, for different layers with increasing porosity with increasing oxygen pressure during deposition. The base resistance under ambient conditions was investigated and found to be highly dependent on the morphology, controlled by the grain-grain contacts. We found that highly porous films show also high resistive response to NO2 and CO. (C) 2017 Elsevier B.V. All rights reserved.