Problems in determining the misorientation axes, for small angular misorientations, using electron backscatter diffraction in the SEM

Problems in determining the misorientation axes, for small angular misorientations, using electron backscatter diffraction in the SEM
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DOI:
10.1046/j.1365-2818.1999.00572.x
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发表时间:
1999-09-01
影响因子:
2
通讯作者:
Prior, DJ
Prior, DJ
中科院分区:
工程技术4区
文献类型:
--
作者:
Prior, DJ

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从电子背散射衍射(EBSD)数据计算取向差轴的相关误差已经在实验上进行了评估。在围绕样品表面的法线施加2度、5度、7度、10度、12度、17度、27度和180度的旋转后,对相同的晶粒进行EBSD测量。从EBSD数据计算了与施加的旋转相关的取向差幅度和取向差轴。对于大于约20度的定向误差幅度,定向误差轴的单独测量是精确的。当在较低的定向误差幅度下,特别是在小于5度的幅度下评估定向误差数据时,必须认识到误差。在可以通过来自多个单独测量的轴的分布来表征取向差轴的情况下,对于30个测量的数据集,只要取向差幅度为10度或更大,则当前EBSD技术是令人满意的。对于较大的数据集,可以将这种方法扩展到较小的错误取向幅度。为了表征小于5度的单个取向差,需要开发新的EBSD技术。
The errors associated with calculating misorientation axes from electron backscatter diffraction (EBSD) data have been assessed experimentally EBSD measurements were made on the same grains after imposed rotations of 2 degrees, 5 degrees, 7 degrees, 10 degrees, 12 degrees, 17 degrees, 27 degrees and 180 degrees around the normal to the specimen surface. The misorientation magnitudes and the misorientation axes associated with the imposed rotations have been calculated from the EBSD data. Individual measurements of misorientation axes are precise for misorientation magnitudes greater than approximate to 20 degrees. The errors must be appreciated when assessing misorientation data at lower misorientation magnitudes and particularly at magnitudes less than 5 degrees. Where misorientation axes can be characterized by the distribution of axes from a number of individual measurements, current EBSD techniques are satisfactory, for data sets of 30 measurements, as long as misorientation magnitudes are 10 degrees or more. With larger data sets it may be possible to extend this approach to smaller misorientation magnitudes. For characterization of individual misorientations less than 5 degrees, new EBSD techniques need to be developed.