Comparing the thermal performance and endurance of resistive and PIN silicon microheaters for phase-change photonic applications
Comparing the thermal performance and endurance of resistive and PIN silicon microheaters for phase-change photonic applications
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DOI：
10.1364/ome.488564
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发表时间：
2023-05
影响因子：
2.8
通讯作者：
John R. Erickson;Nicholas A. Nobile;D. Vaz;Gouri Vinod;Carlos A. Ríos Ocampo;Yifei Zhang;Juejun Hu;S. Vitale;Feng Xiong;N. Youngblood
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作者：
John R. Erickson;Nicholas A. Nobile;D. Vaz;Gouri Vinod;Carlos A. Ríos Ocampo;Yifei Zhang;Juejun Hu;S. Vitale;Feng Xiong;N. Youngblood
光学相变材料利用非晶态和晶态之间的可逆相变，在集成光子电路中实现了非易失性可编程性。为了在芯片上以可扩展的方式控制这些材料，通过电流加热波导本身是一个有吸引力的选择，最近已经使用各种方法进行了探索。在这里，我们比较了两种有前途的加热器设计的加热效率、制造可变性和耐用性，这两种加热器设计可以很容易地集成到硅波导中——一种是使用n掺杂硅的电阻式微加热器，另一种是使用硅p型/本质/n型（PIN）结。拉曼测温法用于表征这些微加热器的加热效率，表明这两个器件可以达到相似的峰值温度，但暴露了PIN器件的损坏。随后的耐久性测试和两种器件类型的特性进一步深入了解了可编程相变光子器件的可靠性和潜在损伤机制
: Optical phase-change materials have enabled nonvolatile programmability in integrated photonic circuits by leveraging a reversible phase transition between amorphous and crystalline states. To control these materials in a scalable manner on-chip, heating the waveguide itself via electrical currents is an attractive option which has been recently explored using various approaches. Here, we compare the heating efficiency, fabrication variability, and endurance of two promising heater designs which can be easily integrated into silicon waveguides—a resistive microheater using n-doped silicon and one using a silicon p-type/intrinsic/n-type (PIN) junction. Raman thermometry is used to characterize the heating efficiencies of these microheaters, showing that both devices can achieve similar peak temperatures but revealing damage in the PIN devices. Subsequent endurance testing and characterization of both device types provide further insights into the reliability and potential damage mechanisms that can arise in electrically programmable phase-change photonic devices