Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can
Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal Can
复制标题
DOI：
10.1109/jmems.2010.2055545
复制
发表时间：
2010-08-01
影响因子：
2.7
通讯作者：
Hane, Kazuhiro
中科院分区：
文献类型：
--
作者：
Chu, Hoang Manh;Tokuda, Takayuki;Hane, Kazuhiro
在本文中，我们介绍了静电梳状驱动谐振微镜的设计、制造和真空封装。使用绝缘体上硅（SOI）晶片制造具有适合激光扫描显示器的高谐振频率的微镜。通过干法蚀刻从 SOI 晶圆上切下一个单独的芯片，该芯片是由四个微镜组成的阵列，总尺寸为 5.5 x 5.5 mm(2)。将管芯在真空包装机中以10(-4)Pa的压力封装在带有窗口的transistor-outline-8金属罐中。为了排出封装过程后产生的残余气体，在金属罐中使用了非蒸发吸气剂。制造的微镜的谐振频率分别为13 kHz和25 kHz。在5V的低驱动电压下实现了约10度的旋光角。由于空气摩擦损失的减少，工作电压比在大气压下工作的电压降低了32倍。根据镜面振荡的振幅和品质因数，评估真空封装内的工作压力约为0.7Pa。此外，在包装之前和之后评估了一些特性，例如微镜的表面轮廓。在高达 75 摄氏度的温度下测试了封装镜子的耐用性。还描述了有关空气摩擦的理论解释。 [2010-0042]
In this paper, we present the design, fabrication, and vacuum package of an electrostatic comb-drive resonant micromirror. The micromirror having a high resonant frequency suitable for a laser scanning display was fabricated using a silicon-on-insulator (SOI) wafer. An individual die which was an array of four micromirrors with a total size of 5.5 x 5.5 mm(2) was diced from the SOI wafer by dry etching. The die was packaged in a transistor-outline-8 metal can with a window in a vacuum-packaging machine at a pressure of 10(-4) Pa. To evacuate the residual gases generated after the package process, a nonevaporable getter was used in the metal can. The resonant frequencies of the fabricated micromirrors were 13 and 25 kHz, respectively. An optical rotation angle of about 10 degrees was achieved at a low driving voltage of 5 V. Due to the decrease of air-friction loss, the operation voltage decreased by a factor of 32 compared with the voltage operated at atmospheric pressure. The operation pressure in the vacuum package was evaluated to be about 0.7 Pa from the amplitude and quality factor of the mirror oscillation. Moreover, several properties, such as the surface profile of the micromirror, were evaluated before and after the packaging. The durability of the packaged mirror was tested at temperatures of up to 75 degrees C. The theoretical explanations about air friction were also described. [2010-0042]