Depth profiling of polycrystalline layers under a surface using x‐ray diffraction at small glancing angle of incidence
Depth profiling of polycrystalline layers under a surface using x‐ray diffraction at small glancing angle of incidence
复制标题
使用小掠射角的 X 射线衍射对表面下的多晶层进行深度分析
DOI：
10.1002/sia.1961
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发表时间：
2005
影响因子：
1.7
通讯作者：
K. Ikeda
中科院分区：
文献类型：
--
作者：
Y. Fujii;T. Komai;K. Ikeda
研究了用小掠射角x射线衍射评价表面下多晶结构的分析方法。测量了不同入射角下多晶铁表面的x射线衍射强度，并通过分析x射线在具有复折射率随深度连续变化特征的表层材料中的传播强度来研究入射角的依赖关系。分析了衍射x射线强度对掠射角的依赖性，并评估了氧化铁多晶层的深度分布，其精度达到纳米级。版权所有©2005 John Wiley & Sons， Ltd
An analysis method for evaluating a polycrystal structure under a surface using x‐ray diffraction at small glancing angle incidence was studied. Intensities of the diffracted x‐rays on a polycrystalline iron surface were measured at various incidence angles, and the dependency of the incidence angles was investigated by analysing the intensity of x‐ray propagation in surface layer materials characterized by a complex refractive index that changes continuously with depth. The dependence of the diffracted x‐ray intensities on the glancing angle was analysed and the depth profile of the polycrystalline layers of oxidized iron was evaluated to an accuracy of the order of nanometres. Copyright © 2005 John Wiley & Sons, Ltd.