Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition
Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition
复制标题
使用电子束诱导化学气相沉积制造磁性纳米结构
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
K. Furuya
中科院分区：
文献类型：
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作者：
M. Takeguchi;M. Shimojo;K. Furuya
采用精细聚焦电子束诱导化学气相沉积技术，在室温下制备了点、棒、环等形状的纳米结构。所形成的结构表现出一个非晶相含有铁，碳和氧元素在整个体积和氧化铁纳米晶体存在于其表面附近。在约600 °C下的沉积后热处理导致转化为结晶α-铁相，同时保持它们的形状。磁化后，通过电子全息术定量测量了所形成的和α-铁纳米棒的剩余磁通密度Br，表明它们的Br值与铁微粉的Br值相似，尽管α-铁纳米棒具有比所形成的纳米棒小的Br值。
Finely focused electron beam induced chemical vapour deposition with iron carbonyl gas, Fe(CO)5, was carried out at room temperature to fabricate desired-shape nanostructures such as dots, rods and rings. The as-formed structures exhibited an amorphous phase containing iron, carbon and oxygen elements in the whole volume and iron oxide nanocrystals existed near their surfaces. A post-deposition heat treatment at about 600 °C resulted in the transformation into a crystalline alpha-iron phase, while their shapes were maintained. The residual magnetic flux density Br of the as-formed and alpha-iron nanorods was quantitatively measured by electron holography after magnetization, showing that their Br values were similar to those of iron micro-powders, although the alpha-iron nanorod has a smaller Br value than the as-formed nanorod.