Laterally actuated torsional micromirrors for large static deflection
Laterally actuated torsional micromirrors for large static deflection
复制标题
用于大静态偏转的横向驱动扭转微镜
DOI：
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复制
发表时间：
2003
影响因子：
2.6
通讯作者：
K. Pister
中科院分区：
文献类型：
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作者：
V. Milanovic;M. Last;K. Pister
我们报告的实施横向静电驱动，扭转悬浮绝缘体上硅（SOI）微镜的静态光学偏转角超过40/spl度/峰到峰。解耦的致动器和反射镜的设计允许大的致动器阵列，允许大直流偏转角和高谐振频率共存于同一设备。SOI结构是完全单片的，从SOI晶片器件层的正面和背面进行微机械加工。面内驱动被转换成面外运动和旋转，使得能够集成各种各样的SOI-MEMS传感器、致动器和微镜。当在1321 Hz下谐振操作时，典型装置在127 Vdc和15 Vac振幅下测量到高达92/spl deg/峰-峰光学偏转。
We report on the implementation of laterally electrostatically actuated, torsionally suspended silicon-on-insulator (SOI) micromirrors with a static optical deflection angle of over 40/spl deg/ peak-to-peak. Decoupling the actuator and mirror design allows for large actuator arrays, allowing large dc deflection angle and high resonant frequency to coexist in the same device. The micromirror structures are fully monolithic, micromachined from the front side and back side of an SOI wafer-device layer. In-plane actuation is transformed into out-of-plane motion and rotation, enabling integration of a wide variety of SOI-MEMS sensors, actuators, and micromirrors. When operated in resonance at 1321 Hz, a typical device measured up to 92/spl deg/ peak-to-peak optical deflection at 127 Vdc with 15 Vac amplitude.